Recently setup clean room lab with class 1000 yellow room for lithography
- Thin film deposition (sputter and ebeam), cleaning, wet etching (laminar flow wet betch), photolithography (1um laser write, 8000rm spin coater, baking), characterization (reflectometry system, and microscope), furnace for oxidation and doping
Class 1000 yellow room for photolithography Probe station
Sputter and e-beam deposition systems Laser writer
• Mtech/Phd Student started projects on fabrication of devices such as MEMs, MOSFETs, III-V devices, CNT sensors, device reliability
• Currently fabrication capability is limited by good doping and etching systems, lab infrastructure; plan to be procure in future.